多层半导体薄膜膜厚测量,立仪科技应用案例封面图

Film thickness measurement of multilayer semiconductor films

Semiconductor devices usually contain multiple layers of dielectric films and metal films. The thickness of each layer directly affects the electrical performance and reliability. Traditional methods have difficulty distinguishing multi-layered structures or lack of reproducibility. LightE uses the Point White Light Interferometer measurement solution to achieve non-contact film thickness measurement of multi-layer films, helping customers accurately control the film deposition process.